Coater

Balzers ZH620

Condition: good (used), Opportunity: 2x Pfeiffer Classic 590 available! Price: EUR 99.500/piece. Configuration Coater 1: 2x Pfeiffer TPH 2301 (2300ls) completely overhauled Pfeiffer DCU 600 2x VAT Throttle Valve 64048-pe48-ads2/0001 1x Pfeiffer PKR251 fullrange sensor Pfeiffer TPR280 for prevacuum Pfeiffer DUO 120 prepump (120m3/h) Vacuumchamber: Csdpfxshwv Tfe Addsaa for substrate size round 840mm incl shielding and spare shielding set 2x viewport Several feedthroughs Rotating feedthrough incl thermocouple Infrared heater Watermanifold plus valves Vacuumvalves for venting-pumpdown etc Notes: Currently used for Resistance Evaporation (no boats available) Current PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc) Configuration Coater 2: 2x Pfeiffer TPH 2201 s p c (horizontal turbo 2200ls) completely overhauled Pfeiffer DCU 600 2x VAT Throttle Valve 64048-pe48-ads2/0001 1x Pfeiffer PKR251 fullrange sensor Pfeiffer TPR280 for prevacuum Pfeiffer DUO 120 prepump (120m3/h) Vacuumchamber: for substrate size round 840mm incl shielding and spare shielding set 2x viewport Several feedthroughs Rotating feedthrough incl thermocouple Infrared heater Watermanifold plus valves Vacuumvalves for venting-pumpdown etc Notes: Current used for Resistance Evaporation (no boats available) Current PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)

Year of construction: 1989, condition: ready for operation (used), For the deposition of thin metallic layers in the nanometer range, of different materials, cathodes chrome and copper,1 chamber, rotating basket, pre-pump set, turbo pump, hot and cold water supply for heating and cooling of the plant, Caedpohwm Iijfx Addja Cooling plant L&R Kältetechnik WHK-15-W, year of construction: 2004, High voltage source ADS Maris, control cabinet, with control Siemens, complete plant control retrofit, year of construction: 2004