Wafer Front-End Module 300mmBROOKS ASYST
Spartan EFEM Sorter
Machine data
- Machine type:
- Wafer Front-End Module 300mm
- Manufacturer:
- BROOKS ASYST
- Model:
- Spartan EFEM Sorter
- Year of construction:
- 2010
- Condition:
- used
Price & Location
- Location:
- Heilbronner Str. 22, 01189 Dresden, Deutschland
Details about the offer
- Listing ID:
- A20798077
- Reference number:
- LW43278
- Update:
- 05.01.2026
Description
Model: ASYST Spartan EFEM
Type: Sorter
Condition: Used
Technical Data:
100-240V AC
50/60Hz
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10A
General:
300-mm EFEM with 3 load ports, cleanroom mini-environment, and integrated wafer transfer robot
This unit is an Equipment Front End Module (EFEM) from the ASYST Spartan series, designed for fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.
It features three load ports, a mini-environment with ULPA air filters, internal lighting, comprehensive safety controls, and all necessary interfaces for seamless integration into production lines.
In addition, it comes with a fully integrated wafer transfer robot that extracts wafers from FOUP/carrier load ports, separates them, and precisely delivers them to downstream process modules.
Year of manufacture: 27.12.2010
Including CD with operating, service, and installation manuals (9701-3060-01 Rev G)
The listing was translated automatically. Translation errors are possible.
Seller
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