Measuring system
ASML YieldStar S-200B

Year of construction
2011
Condition
Used
Location
Dresden Germany
Measuring system ASML YieldStar S-200B
ASML YieldStar S-200B
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Machine data

Machine type:
Measuring system
Manufacturer:
ASML
Model:
YieldStar S-200B
Year of construction:
2011
Condition:
excellent (used)
Functionality:
fully functional

Price & Location


Location:
Heilbronner Str. 22, 01189 Dresden, DE Germany
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Details about the offer

Listing ID:
A19967480
Reference number:
DV10125
Update:
10.09.2025

Description

Optical overlay metrology system, Advanced Semiconductor Materials Lithography stand-alone overlay metrology system for 300 mm wafers, YieldStar S 200B
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Model: S200B
Type: YieldStar
Year of manufacture: 2011

Technical data:
Wafer size: 300 mm (12")
Laser source: LPPS, water cooling

General information:
The YSS200B is an optical overlay measurement system used for fast and highly precise measurement of overlay deviations on 300 mm wafers – typically for post-etch monitoring and production process control as a stand-alone system.

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Registered since: 2014

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